convex corner

On the Convex Corner Etching of Silicon Mesa Structure

硅台面结构凸角腐蚀原因探析

Convex Corner Undercutting and Compensation in Si ( 100) Wafer

硅（100）晶面的凸角腐蚀及其补偿

A Novel Fabrication of in-Plane Silicon Microneedles Using Structure of Convex Corner in ( 110) Si-Wafer

用（110）硅面各向异性腐蚀的凸角结构制作微米针管

Analysis of transonic flow past an axisymmetric convex corner

轴对称跨声速绕流的凸角流动分析

Compensation technique for < 100> convex corner undercutting in KOH anisotropic etching of silicon and its application

硅KOH腐蚀<100>晶向凸角补偿技术及应用

The undercutting will appear if there is no compensation on convex corner in etching of Si.

在硅的腐蚀过程中,如果不对台面凸角加以补偿,会产生严重的削角现象.

This paper presents a novel compensation technology for the ( 100) silicon convex corner under-cutting with 100 direction masks.

本文首次研究了（100）硅的、边沿＜100＞方向掩膜的各向异性腐蚀凸角削角补偿技术，成功地解决了上述问题。

The influence of the angle of convex corner on the effect of detonation waves

拐角角度对爆轰波拐角效应的影响